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PS6 |
FEATURES
- Running costs are considerably reduced because replacing the sensor unit can be done by the user.
- By eliminating the need for gas calibration in a clean room, the system can be easily checked by simply operating the test switch when starting up the system or when replacing the sensor unit. This prevents indoor contamination due to gas use. * Gas calibration can be done at our company or outside of a clean room.
- There is no need to obtain outside help for maintenance, since the sensor unit and filter can be charged without the use of tools.
- The same detector base unit can be used to detect any kind of gas simply by changing the sensor unit (except for PS-6N)
A full lineup of sensor units are available for detecting all types of gases required for production of semiconductor materials. The unit can be used in any type of semiconductor manufacturing plant.
The standard output signal ranges from 4 to 20 mA, thus allowing connection to a variety of instruments and systems. The detector can also be connected to devices already installed.
Specifications
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Gas Detector PS-6 |
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Type |
PS-6 |
PS-6N |
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Type of Sensor unit |
Type of gas |
Full scale (PPM) |
NF3 CCI4 |
100 100 |
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SiH4 |
25 |
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SiH4 |
5 |
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PH3 |
1 |
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B2H6 |
0.5 |
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ASH3 |
0.25 |
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H2S6 |
0.25 |
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Si2H6 |
5 |
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SiH2CL2 |
25 |
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GeH4 |
1 |
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(CH3)3 CASH2 |
0.2 |
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(CH3)3 CPH2 |
1 |
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NH3 |
100 |
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HF |
10 |
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Pf3 |
10 |
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HCI |
25 |
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HCI |
5 |
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HBr |
10 |
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F2 |
5 |
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CI2 |
5 |
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CIF3 |
1 |
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O3 |
1 |
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CO |
250 |
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H2S |
50 |
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SO2 |
25 |
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NO2 |
10 |
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O2 |
25% |
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Principle of Detection |
Controlled potential Electrolytic, type, Hot-wire semiconductor type, Galvanic cell type FOR O2 Diaphragm Galvanic Cell type |
Pyrolytic / Controlled Potential Electrolytic type |
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Sampling method |
Pump suction type (0.51/min) |
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Sampling tubing |
Material: Teflon Outer diameter; 6mm / inner diameter; 4 mm Length of tubing; 20m (max.) For the detection gases which tend to be adsorbed easily, length should be within 5 m. |
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Gas concentration output signal |
4-20mA, common with the negative line power supply. |
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Low flow level signal |
Open collector ON |
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Applicable cable |
CVVS three or four cores (when flow error signal is used) |
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Cable length |
Max. 1-km cable with 2mm2 cross section |
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Power Source |
24VDC ± 10% |
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Power Rating |
10W |
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Dimensions |
W73 X H198 X D140mm (excluding protruding parts) |
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Weight |
Approx. 2.5kg. |
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